Two-wavelength interferometric profilometry with a phase-step error-compensating algorithm

Optical Engineering

Volumn 45, Issue 11, 2006, Pages

  Schmit, Joanna ^a   Hariharan, Parameswaran ^b  

^a VEECO INSTRUMENTS INC   (United States)

^b UNIVERSITY OF SYDNEY   (Australia)

Author keywords

Interferometry; Phase shifting; Two wavelength

Indexed keywords

ALGORITHMS; INTERFEROMETERS; PHASE SHIFT; PROFILOMETRY; WAVELENGTH;

INTERFEROMETRIC PROFILOMETRY; MIRAU INTERFEROMETER;

INTERFEROMETRY;

EID: 33847692334     PISSN: 00913286     EISSN: 15602303     Source Type: Journal    
DOI: 10.1117/1.2387882     Document Type: Article

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