SCOPUS 정보 검색 플랫폼

Volumn 22, Issue 17, 2012, Pages 8281-8286

Ultra-low-k cyclic carbon-bridged PMO films with a high chemical resistance

(8) Goethals, Frederik a Ciofi, Ivan b Madia, Oreste b Vanstreels, Kris b Baklanov, Mikhail R b Detavernier, Christophe a Van Der Voort, Pascal a Van Driessche, Isabel a

a GHENT UNIVERSITY (Belgium)

b IMEC (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

AGGRESSIVE CHEMICALS; ALKALINE SOLUTIONS; CRACK FREE; ETHANOL MIXTURES; HIGH RESISTANCE; HYDROPHOBIC PROPERTIES; K-VALUE; MESOPOROUS SILICA; MICRO-ELECTRONIC DEVICES; PERIODIC MESOPOROUS ORGANOSILICAS; POLYOXYETHYLENE; POROGENS; POROUS FILM; ULTRA-LOW-K DIELECTRICS; ULTRALOW-K;

ALKALINITY; CHEMICAL REACTIONS; CHEMICAL RESISTANCE; CHLORINE COMPOUNDS; ETHANOL; ETHERS; HYDROCHLORIC ACID; HYDROPHOBICITY; MICROELECTRONICS; POLYETHYLENE OXIDES; SILICA;

CARBON FILMS;

EID: 84859755892 PISSN: 09599428 EISSN: 13645501 Source Type: Journal
DOI: 10.1039/c2jm30312d Document Type: Article

Times cited : (48)

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