Thin-film piezoelectric materials for a better energy harvesting MEMS

Journal of Microelectromechanical Systems

Volumn 21, Issue 2, 2012, Pages 451-457

  Wasa, Kiyotaka ^a   Matsushima, Tomoaki ^b   Adachi, Hideaki ^b   Kanno, Isaku ^a   Kotera, Hidetoshi ^a  

^a KYOTO UNIVERSITY   (Japan)

^b PANASONIC CORPORATION   (Japan)

Author keywords

Hard ferroelectric thin films; Pb(Mn, Nb) O 3 PZT; PZT based ternary perovskite; thin film EH power MEMS

Indexed keywords

ALN; ALN THIN FILMS; C-DOMAIN; ENERGY CONVERSION RATES; FIGURES OF MERITS; OUTPUT ENERGY; OUTPUT POWER; PB(ZR , TI)O; PEROVSKITE COMPOUNDS; PEROVSKITE THIN FILMS; PIEZOELECTRIC COEFFICIENT; PIEZOELECTRIC ENERGY HARVESTING; PMNN-PZT; POLYCRYSTALLINE THIN FILM; POWER MEMS; POWER MICROELECTROMECHANICAL SYSTEMS; PZT; RF-MAGNETRON SPUTTERING; SINGLE CRYSTAL THIN FILMS; THIN FILM PIEZOELECTRIC;

ELECTROMECHANICAL DEVICES; ENERGY CONVERSION; ENERGY HARVESTING; FERROELECTRIC THIN FILMS; LEAD; LEAD COMPOUNDS; MANGANESE; MEMS; NIOBIUM COMPOUNDS; PEROVSKITE; PIEZOELECTRICITY; SINGLE CRYSTALS; THIN FILMS; ZIRCONIUM;

PIEZOELECTRIC MATERIALS;

EID: 84859701375     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2181156     Document Type: Article

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