High coupling piezoelectric thin films of Pb (Zr,Ti) O3 -based ternary perovskite compounds for GHz-range film bulk acoustic resonators

Applied Physics Letters

Volumn 94, Issue 17, 2009, Pages

  Yamauchi, N ^a   Shirai, T ^a   Yoshihara, T ^a   Hayasaki, Y ^a   Ueda, T ^a   Matsushima, T ^a   Wasa, K ^b   Kanno, I ^b   Kotera, H ^b  

^a PANASONIC CORPORATION   (Japan)

^b KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRO-MECHANICAL COUPLING COEFFICIENTS; FERROELECTRIC RESPONSE; FILM BULK ACOUSTIC RESONATORS; MECHANICAL QUALITY FACTORS; MGO SUBSTRATES; MICRO-ELECTRO MECHANICAL SYSTEMS; PB(ZR , TI)O3; PB(ZR ,TI)O; PEROVSKITE COMPOUNDS; PIEZOELECTRIC THIN FILMS; PMNN-PZT; QUENCHING PROCESS; RF- MAGNETRON SPUTTERING;

ACOUSTICS; FERROELECTRIC FILMS; FILM GROWTH; LEAD; LEAD ALLOYS; MANGANESE; MANGANESE COMPOUNDS; MEMS; MICROELECTROMECHANICAL DEVICES; NIOBIUM; OXIDE MINERALS; OZONE WATER TREATMENT; PEROVSKITE; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; QUENCHING; RESONATORS; SEMICONDUCTING LEAD COMPOUNDS; THIN FILMS; ZIRCONIUM;

ACOUSTIC RESONATORS;

EID: 65449165021     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3126060     Document Type: Article

References (9)

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