High piezoelectricity of Pb(Zr,Ti)O3 -based ternary compound thin films on silicon substrates

Applied Physics Letters

Volumn 94, Issue 12, 2009, Pages

  Zhang, Tao ^a   Wasa, Kiyotaka ^a,b   Zhang, Shu Yi ^a   Chen, Zhao Jiang ^a   Zhou, Feng Mei ^a   Zhang, Zhong Ning ^a   Yang, Yue Tao ^a  

^a NANJING UNIVERSITY   (China)

^b KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLOGRAPHY; ELECTRODEPOSITION; HETEROJUNCTIONS; LEAD; LEAD ALLOYS; MAGNETRON SPUTTERING; NANOCANTILEVERS; OXIDE MINERALS; PEROVSKITE; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; PYROELECTRICITY; SEMICONDUCTING SILICON COMPOUNDS; SILICON COMPOUNDS; SUBSTRATES; TERNARY ALLOYS; TERNARY SYSTEMS; THIN FILMS; VAPOR DEPOSITION; ZIRCONIUM;

DEPOSITION CONDITIONS; HETEROSTRUCTURE; HETEROSTRUCTURES; PB(ZR ,TI)O; PEROVSKITE PHASE; PMNN-PZT; POLYCRYSTALLINE STRUCTURES; PZT; PZT THIN FILMS; RF- MAGNETRON SPUTTERING; SI-BASED; SILICON SUBSTRATES; TERNARY COMPOUNDS;

SEMICONDUCTING LEAD COMPOUNDS;

EID: 63549104500     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3103553     Document Type: Article

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