Fabrication of single crystal PZT thin films on glass substrates

Vacuum

Volumn 81, Issue 5, 2007, Pages 571-578

  Terada, Kenichiro ^a   Suzuki, Takaaki ^a   Kanno, Isaku ^a   Kotera, Hidetoshi ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

Glass substrates; MEMS; PZT thin films; Single crystal; Transformation

Indexed keywords

EPITAXIAL GROWTH; GLASS; MICROELECTROMECHANICAL DEVICES; RUBBER; SINGLE CRYSTALS; SUBSTRATES;

EPITAXIAL FILMS; PZT THIN FILMS; SILICONE RUBBER;

FERROELECTRIC THIN FILMS;

EID: 33845228184     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.06.007     Document Type: Article

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