Preparation and sorption characteristics of Zr-Co-RE getter films

Journal of Alloys and Compounds

Volumn 529, Issue , 2012, Pages 69-72

  Bu, J G ^a   Mao, C H ^a   Zhang, Y ^a   Wei, X Y ^a   Du, J ^a  

^a GENERAL RESEARCH INSTITUTE FOR NONFERROUS METALS   (China)

Author keywords

RF magnetron sputtering; Scanning electron microscopy; Sorption property; Thin film getter; X ray diffraction

Indexed keywords

ACTIVATION PARAMETER; ALLOY TARGET; FILM GETTERS; FITTING FORMULA; LAYERED STRUCTURES; LOW TEMPERATURES; RF-MAGNETRON SPUTTERING; SORPTION CAPABILITY; SORPTION CAPACITIES; SORPTION CHARACTERISTICS; SORPTION PROPERTIES; SUBSTRATE ROUGHNESS;

COBALT; GETTERS; MAGNETRON SPUTTERING; RARE EARTH ELEMENTS; SCANNING ELECTRON MICROSCOPY; SORPTION; SUBSTRATES; THIN FILMS; VAPOR DEPOSITION; X RAY DIFFRACTION; ZIRCONIUM;

FILM PREPARATION;

EID: 84859512029     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jallcom.2012.01.030     Document Type: Article

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