Comparison of Ti-Zr-V nonevaporable getter films deposited using alloy or twisted wire sputter-targets

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 28, Issue 6, 2010, Pages 1404-1412

  Valizadeh, R ^a   Malyshev, O B ^a   Colligon, J S ^b   Hannah, A ^a   Vishnyakov, V M ^b  

^a DARESBURY LABORATORY   (United Kingdom)

^b MANCHESTER METROPOLITAN UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION TEMPERATURES; ALLOY TARGET; COMMONLY USED; FILM TOPOGRAPHY; GRAIN SIZE; NEG COATING; NEG FILM; NON-EVAPORABLE GETTERS; TWISTED WIRE;

ALLOYS; COATINGS; GETTERS; PUMPS; TITANIUM ALLOYS; TOPOGRAPHY; WIRE; ZIRCONIUM;

VANADIUM ALLOYS;

EID: 78149450098     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3504600     Document Type: Article

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