Preparation and characterization of non-evaporable porous Ti-Zr-V getter films

Surface and Coatings Technology

Volumn 201, Issue 7 SPEC. ISS., 2006, Pages 3977-3981

  Li, Chien Cheng ^a   Huang, Jow Lay ^a   Lin, Ran Jin ^b   Lii, Ding Fwu ^c  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b Intellectual Property Exchange Limited   (Taiwan)

^c CHENG SHIU UNIVERSITY   (Taiwan)

Author keywords

BET; Getter; Glancing angle; NEG; Porous films; TiZrV

Indexed keywords

FILM GROWTH; GETTERS; MAGNETRON SPUTTERING; POROUS MATERIALS; TITANIUM ALLOYS;

GLANCING ANGLE; POROUS FILMS;

METALLIC FILMS;

FILM GROWTH; GETTERS; MAGNETRON SPUTTERING; METALLIC FILMS; POROUS MATERIALS; TITANIUM ALLOYS;

EID: 33751220823     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.08.018     Document Type: Article

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