Influence of the substrate coating temperature on the vacuum properties of Ti-Zr-V non-evaporable getter films

Vacuum

Volumn 71, Issue 1-2 SPEC., 2003, Pages 307-315

  Benvenuti, C ^a   Chiggiato, P ^a   Pinto, P Costa ^a   Prodromides, A ^a   Ruzinov, V ^a  

^a CERN   (Switzerland)

Author keywords

Accelerators; Coatings; Getters; NEG films; Pumping speed; Substrate temperature; UHV; Vacuum

Indexed keywords

COATINGS; SUBSTRATES; SURFACE ROUGHNESS; TITANIUM COMPOUNDS; X RAY DIFFRACTION ANALYSIS;

SUBSTRATE COATING TEMPERATURE;

THIN FILMS;

EID: 0037427426     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00755-8     Document Type: Conference Paper

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