Use of getter-catalyst thin films for enhancing ion pump vacuum performances

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 25, Issue 4, 2007, Pages 1234-1239

  Mura, M ^a   Paolini, C ^a  

^a Fratelli Varian 54   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; DATA REDUCTION; PRESSURE DISTRIBUTION; PUMPING PLANTS; THIN FILMS; VACUUM;

COMBINED PUMPING SYSTEMS; STICKING FACTOR; UNITARY SYSTEM;

CATALYSTS;

EID: 34547327328     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2731348     Document Type: Article

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