Vacuum properties of TiZrV non-evaporable getter films

Vacuum

Volumn 60, Issue 1-2, 2001, Pages 57-65

  Benvenuti, C ^a   Chiggiato, P ^a   Costa Pinto, P ^a   Escudeiro Santana, A ^a   Hedley, T ^a   Mongelluzzo, A ^a   Ruzinov, V ^a   Wevers, I ^a  

^a CERN   (Switzerland)

Author keywords

Accelerators; Getters; Thin films; TiZrV alloys; Vacuum

Indexed keywords

AGING OF MATERIALS; COLLIDING BEAM ACCELERATORS; COMPOSITION EFFECTS; CRYSTAL STRUCTURE; DEGASSING; GETTERS; MORPHOLOGY; SPUTTER DEPOSITION; SYNCHROTRON RADIATION; THIN FILMS; TITANIUM ALLOYS; VACUUM TECHNOLOGY;

NONEVAPORABLE GETTER FILMS (NEG);

METALLIC FILMS;

EID: 0035155109     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(00)00246-3     Document Type: Article

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