Error analysis of a new cylindrical capacitive sensor (CCS) for measuring five-dimensional motions of a rotor

Mechanical Systems and Signal Processing

Volumn 29, Issue , 2012, Pages 148-163

  Ahn, Hyeong Joon ^a   Jeon, Soo ^b  

^a Soongsil University   (South Korea)

^b UNIVERSITY OF WATERLOO   (Canada)

Author keywords

Cylindrical capacitive sensor (CCS); Error analysis; Multi dimensional measurement; Rotating machinery

Indexed keywords

COMPENSATION METHOD; CYLINDRICAL CAPACITIVE SENSOR (CCS); DISPLACEMENT SENSOR; NON-LINEAR ERROR; NON-LINEARITY; RADIAL ERROR MOTION; ROTATING SHAFT; SENSING ELECTRODE; SENSOR SIGNALS; SENSOR SYSTEMS;

CAPACITIVE SENSORS; CROSSTALK; MATHEMATICAL MODELS; MEASUREMENT ERRORS; ROTATING MACHINERY; SENSORS;

ERROR ANALYSIS;

EID: 84859429743     PISSN: 08883270     EISSN: 10961216     Source Type: Journal    
DOI: 10.1016/j.ymssp.2011.07.027     Document Type: Conference Paper

References (27)

1. O.S. Kim, S.H. Lee, and D.C. Han Positioning performance and straightness error compensation of the magnetic levitation stage supported by the linear magnetic bearing IEEE Transactions on Industrial Electronics 50 2 2003 374 378
2. G. Schweitzer, H. Bleuler, and A. Traxler Active Magnetic Bearings: Basics, Properties and Applications of Active Magnetic Bearings 1994 V.D.F edition Zurich, Switzerland
3. E.C. Heerens Basic principals in designing highly reliable multi-terminal capacitor sensors and performance of some laboratory test models Sensors and Actuators 3 1982 137 148
4. G. Brasseur Design rules for robust capacitive sensors IEEE Transactions on Instrumentation and Measurement 52 2003 1261 1265
5. L.K. Baxter Capacitive Sensors, Piscataway 1997 IEEE Press NJ
6. D. Rolka, A. Poghossian, and M.J. Schoning Integration of a capacitive EIS sensor into a FIA system for pH and penicillin determination Sensors 4 2004 84 94 (Pubitemid 40643574)
7. I. Bontidean, J. Ahlqvist, A. Mulchandani, W. Chen, W. Bae, R.K. Mehra, A. Mortari, and E. Csoregi Novel synthetic phytochelatin-based capacitive biosensor for heavy metal ion detection Biosensors and Bioelectronics 18 2003 547 553 (Pubitemid 36428643)
8. F. Castelli An integrated tactile-thermal robot sensor with capacitive tactile array IEEE Transactions on Industry Applications 38 2002 85 90 (Pubitemid 34491221)
9. S. Hunt, A. Rudge, M. Carey, M. Parfitt, J.G. Chase, and I. Huntsman Micro-electro-mechanical-systems direct fluid shear stress sensor arrays for flow control Smart Materials and Structures 11 2002 617 621 (Pubitemid 35017101)
10. C. Sung-Pil, L. Jeong-Bong, and M.G. Allen Robust capacitive pressure sensor array Sensors and Actuators A: Physical 101 12 2002 231 238
11. F.N. Toth, and G.C.M. Meijer A low-cost, smart capacitive position sensor IEEE Transactions on Instrumentation and Measurement 41 6 1992 1041 1044
12. F. Zhu, J.W. Spronck, and W.C. Heerens A simple capacitive displacement sensor Sensors and Actuators A: Physical 26 13 1991 265 269
13. F. Restagno, J. Crassous, E. Charlaix, and M. Monchanin A new capacitive sensor for displacement measurement in a surface-force apparatus Journal of Measurement Science and Technology 12 2001 16 22
14. A. Pedrocchi, S. Hoen, G. Ferrigno, and A. Pedotti Perspectives on MEMS in bioengineering: a novel capacitive position microsensor IEEE Transactions on Biomedical Engineering 47 2000 8 11 (Pubitemid 30043993)
15. A.H. Falkner The use of capacitance in the measurement of angular and linear displacement IEEE Transactions on Instrumentation and Measurement 43 1994 939 942
16. L. Xiujun, G.C.M. Meijer, G.W. de Jong, and J.W. Spronck An accurate low-cost capacitive absolute angular-position sensor with a full-circle range IEEE Transactions on Instrumentation and Measurement 45 1996 516 520 (Pubitemid 126781507)
17. G. Brasseur, P.L. Fulmek, and W. Smetana Virtual rotor grounding of capacitive angular position sensors IEEE Transactions on Instrumentation and Measurement 49 2000 1108 1111
18. R. Nerino, F. Cabiati, G.B. Picotto, and A. Sacconi A surface profile reconstruction method based on multisensor capacitive transducers Measurement 13 No. 1 1994 77 84
19. P.M. Kolb, R.S. Decca, and H.D. Drew Capacitive sensor for micro-positioning in two dimensions Review of Scientific Instruments 69 1 1998 310 312 (Pubitemid 128606590)
20. E.D. Tsamis, and J.N. Avaritsiotis Design of planar capacitive type sensor for water content monitoring in a production line Sensors and Actuators A: Physical 118 2 2005 202 211 (Pubitemid 40183480)
21. P.D. Chapman A capacitance based ultra-precision spindle error analyzer Precision Engineering 7 1985 129 137
22. H.J. Ahn, S. Jeon, and D.C. Han Error analysis of the cylindrical capacitive sensor for active magnetic bearing spindles ASME Journal of Dynamics Systems, Measurement, and Control 122 2000 102 107
23. I.H. Kim, J.H. Kim, J.A. Jang, D.Y. Jang, and P.S. Shim 3-Axis displacement sensor for a high-speed machining center spindle Spring Conference of KSPE 2009 235 236
24. H.J. Ahn, J.M. Park, and D.C. Han Geometric error filtering performance of a cylindrical capacitive sendor (CCS) considering circumferential gaps Measurement 40 2007 300 313
25. H.J. Ahn, J.-H. Park, C.-Y. Um, and D.-C. Han A disk-type capacitive sensor for five-dimensional motion measurements Measurement Science and Technology 19 045202 2008 10
26. H.J. Ahn, I.H. Kim, and D.C. Han Nonlinear analysis of cylindrical capacitive sensor Measurement Science and Technology 16 2005 699 706
27. H.J. Ahn, and S. Jeon Effects of rotor obliquity on the cylindrical capacitive sensor (CCS) Measurement Science and Technology 22 No. 3 2011