Perspectives on MEMS in bioengineering: A novel capacitive position microsensor

IEEE Transactions on Biomedical Engineering

Volumn 47, Issue 1, 2000, Pages 8-11

  Pedrocchi, Alessandra ^a,b   Hoen, Storrs ^a   Ferrigno, Giancarlo ^b   Pedotti, Antonio ^a  

^a POLITECNICO DI MILANO   (Italy)

^b AGILENT TECHNOLOGIES   (United States)

Author keywords

Capacitive sensor; Microelectromechanical systems (MEMS); Microtechniques; Position sensor

Indexed keywords

ELECTRIC FIELDS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROSENSORS;

CAPACITIVE POSITION MICROSENSORS;

BIOSENSORS;

ARTICLE; BIOMEDICAL ENGINEERING; DRUG DELIVERY SYSTEM; GEOMETRY; LASER SURGERY; MATHEMATICAL MODEL; SENSOR;

DRUG DELIVERY SYSTEMS; ELECTRIC CONDUCTIVITY; ELECTRODES; EQUIPMENT DESIGN; LASER SURGERY;

EID: 0033971384     PISSN: 00189294     EISSN: None     Source Type: Journal    
DOI: 10.1109/10.817612     Document Type: Article

References (4)

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4. L. K. Baxter, Capacitive Sensors Design and Applications. Piscataway, NJ: IEEE Press, 1997.