Positioning performance and straightness error compensation of the magnetic levitation stage supported by the linear magnetic bearing

IEEE Transactions on Industrial Electronics

Volumn 50, Issue 2, 2003, Pages 374-378

  Kim, Oui Serg ^a   Lee, Sang Ho ^b   Han, Dong Chul ^c  

^a Samsung Electro Mechanics   (South Korea)

^b SAMSUNG Electronics   (South Korea)

^c Seoul National University   (South Korea)

Author keywords

Linear magnetic bearing; Magnetically levitated (maglev) stage; Straightness error compensation

Indexed keywords

ELECTROMAGNETS; ERROR COMPENSATION; MAGNETIC LEVITATION; MOTION CONTROL; SENSORS;

LINEAR QUADRATIC GAUSSIAN CONTROL; MACHINING ERROR;

MAGNETIC BEARINGS;

EID: 0037387783     PISSN: 02780046     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIE.2003.809415     Document Type: Article

References (9)

1. M. E. Williams, D. L. Trumper, and R. Hocken, "Magnetic bearing stage for photolithography," Ann. CIRP, vol. 42/1, pp. 607-610, 1993.
2. D. L. Trumper and M. A. Queen, "Precision magnetic suspension linear bearing," presented at the NASA Int. Symp. Magnetic Suspension Technology, NASA Langley Res. Ctr., VA, Aug. 19-23, 1991.
3. K. D. Tieste and K. Popp, "A linear maglev guide for machine tools," in Proc. MAG'97 Industrial Conf. and Exhibition on Magnetic Bearings, Aug. 1997, pp. 37-46.
4. F. Auer and H. F. van Beek, "Practical application of a magnetic bearing and linear propulsion unit for six degrees of freedom positioning," in Proc. 4th Int. Symp. Magnetic Bearings, 1994, pp. 183-188.
5. O. S. Kim, H. J. Ahn, Y. Joung, I. B. Chang, and D. C. Han, "Micropositioning of a linear motion table with magnetic bearing suspension," in Proc. ASPE 12th Annu. Meeting, Oct. 1997, pp. 406-409.
6. W. J. Kim and D. L. Trumper, "High-precision magnetic levitation stage for photolithography," Precis. Eng., vol. 22, no. 2, pp. 66-77, Apr. 1998.
7. J. D. Krauss, Electromagnetics, 4th ed. New York: McGraw-Hill, 1991, pp. 436-437.
8. G. Schweitzer, H. Bleuler, and A. Traxler, Active Magnetic Bearings. Zurich, Switzerland: VDF, 1994, pp. 66-67.
9. Test Code for Machine Tools-Part 2: Determination of Accuracy and Repeatability of Positioning Numerically Controlled Axes, ISO 230-2, 1997.