Nonlinear analysis of cylindrical capacitive sensor

Measurement Science and Technology

Volumn 16, Issue 3, 2005, Pages 699-706

  Ahn, Hyeong Joon ^a   Kim, Il Hae ^b   Han, Dong Chul ^a  

^a Seoul National University   (South Korea)

^b BOSTON UNIVERSITY   (United States)

Author keywords

Capacitive sensor; Displacement; Rotating machinery

Indexed keywords

APPROXIMATION THEORY; CAPACITANCE; ERROR ANALYSIS; MATHEMATICAL MODELS; ROTATING MACHINERY; ROTORS;

CAPACITIVE SENSORS; DISPLACEMENT; HARMONIC ERRORS; SPINDLE ERROR MOTION;

SENSORS;

MEASUREMENT METHOD; NON-LINEAR DYNAMICS; ROTATING STAGE;

EID: 24144453531     PISSN: 09570233     EISSN: 09570233     Source Type: Journal    
DOI: 10.1088/0957-0233/16/3/012     Document Type: Article

References (8)

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