Preparation and characterization of ZnO microcantilever for nanoactuation

Nanoscale Research Letters

Volumn 7, Issue , 2012, Pages 1-5

  Wang, Peihong ^a   Du, Hejun ^a   Shen, Shengnan ^a,b   Zhang, Mingsheng ^b   Liu, Bo ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b DATA STORAGE INSTITUTE   (Singapore)

Author keywords

Micromachining technique; Piezoelectric cantilever; Transverse piezoelectric constant; ZnO thin film

Indexed keywords

ATOMIC FORCE MICROSCOPY; ENAMELS; ENERGY DISPERSIVE SPECTROSCOPY; FIELD EMISSION MICROSCOPES; II-VI SEMICONDUCTORS; METALLIC FILMS; MICROMACHINING; MORPHOLOGY; NANOCANTILEVERS; OPTICAL FILMS; OXIDE FILMS; PIEZOELECTRICITY; SCANNING ELECTRON MICROSCOPY; SILICON COMPOUNDS; SURFACE MORPHOLOGY; SURFACE ROUGHNESS; X RAY DIFFRACTION; ZINC OXIDE;

ENERGY DISPERSIVE X RAY SPECTROSCOPY; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; LASER DOPPLER VIBROMETERS; MICROMACHINING TECHNIQUES; PIEZOELECTRIC CANTILEVERS; PIEZOELECTRIC CONSTANT; RADIO FREQUENCY MAGNETRON SPUTTERING; ZNO THIN FILM;

THIN FILMS;

EID: 84859380832     PISSN: 19317573     EISSN: 1556276X     Source Type: Journal    
DOI: 10.1186/1556-276X-7-176     Document Type: Article

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