Development of wide frequency range-operated micromachined piezoelectric generators based on figure-of-merit analysis

Microsystem Technologies

Volumn 14, Issue 3, 2008, Pages 419-425

  Feng, Guo Hua ^a   Hung, Jin Chao ^a  

^a NATIONAL CHUNG CHENG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; FLEXIBLE STRUCTURES; MICROMACHINING; RESIDUAL STRESSES; SPUTTERING; ZINC OXIDE;

FIGURE OF MERIT (FOM) ANALYSIS; FLEXIBLE MEMBRANES; PIEZOELECTRIC FILMS; PIEZOELECTRIC GENERATORS;

PIEZOELECTRIC DEVICES;

EID: 38349159978     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0538-3     Document Type: Article

References (12)

1. Feng GH, Hung JC (2007) In: Optimal FOM designed piezoelectric microgenerator with energy harvesting in a wide vibration bandwidth. Proc. of the 2nd IEEE international conference on nano/micro engineered and molecular systems, Bangkok, 16-19 January, pp 511-514
2. Gynne-Jones P, Beeby SP, White NM (2001) Towards a piezoelectric vibration-powered microgenerator. IEE Proc Sci Meas Technol 48(2):321-324
3. Han J, von Jouanne A, Le T, Mayaram K, Fiez TS (2004) Novel power conditioning circuits for piezoelectric micro power generators. APEC Ninet Annu IEEE 3:1541-1546
4. 31 piezoelectric coefficient of PZT thin films. J Appl Phys 9:6711-6
5. Li SF, Sutton R, Rabaey JM (2001) Low power operating system for heterogeneous wireless communication system. PACT pp 187-193
6. Ottman G, Bhatt A, Hofmann H, Lesieutre G (2001) In: Adaptive piezoelectric energy harvesting circuit for wireless, remote power supply. Proc. AIAA/ASME/ASCE/AHS/CS structures, structural dynamics, and materials conf., 42nd, Seattle, 16-19 April, pp 33-37
7. Rabaey JM, Ammer MJ, da Silva JL Jr, Patel D, Roundy S (2000) PicoRadio supports ad hoc ultra low-power wirelass networking. Computer 33(7):42-48
8. Sharaf R, Badawy W, Mausa W (2003) In: Piezoelectrically μ-generator for implantable bio-devices. Proceeding of third Canadian workshop on MEMS, Ottaqa, pp 66-69
9. Watanabe S, Fujiu T (1996) PZT thin film actuator/sensor for atomic force microscope. Proc. of 10th IEEE international symposium on applications of ferroelectrics, vol. 1, 18-21 August, pp 199-204
10. White NM, Glynne-Jones P, Beeby SP (2001) A novel thick-film piezoelectric micro-generator. Smart Mater Struct 10:850-2
11. Williams CB, Yaates RB (1996) Analysis of a micro-electric generator for microsystem. Sens Actuators A 52:8-11
12. Yasser A (2005) In: Wireless sensor network node with asynchronous architecture and vibration harvesting micro power generator. Joint SOC-EUSAI conference, Grenoble, pp 43-47