Active-head slider with piezoelectric actuator using shear-mode deformation

Microsystem Technologies

Volumn 15, Issue 10-11, 2009, Pages 1619-1627

  Naniwa, Irizo ^a   Sato, Kazuo ^b   Nakamura, Shigeo ^a   Sato, Kazutaka ^a  

^a HITACHI LTD   (Japan)

^b NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BEARINGS (MACHINE PARTS); DYNAMIC RESPONSE; HARD DISK STORAGE; MAGNETIC HEADS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRICITY; SILICON WAFERS;

ACTIVE-HEAD SLIDERS; AIR BEARING SURFACE; APPLIED VOLTAGES; FEASIBILITY STUDIES; FLYING HEIGHT CONTROL; PIEZOELECTRIC CONSTANT; ROBUST DESIGN METHODS; SINGLE-CRYSTAL SI;

DEFORMATION;

EID: 84898041046     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-009-0862-x     Document Type: Article

References (16)

1. Gunderson NF, Schulz KJ, Bordson TA, Budde RA, Huha MA, Jiang M, Sluzewski DA, Wright JS, Berg LJ (2006) Component development and product integration of secondary piezoelectric actuator for disk drives. In: Joint conference on micromechatronics for information and precision equipment (S07-01)
2. Kurita M, Tsuchiyama R, Tokuyama M, Xu J, Yoshimura Y, Kohira H, Su L, Kato K (2003) Flying-height adjustment of a magnetic head slider with a piezoelectric micro-actuator. IEEE Trans Magn 39(5):2480-2482. doi:10.1109/TMAG.2003.816444
3. Kurita M, Shiramatsu T, Miyake K, Kato A, Soga M, Tanaka H, Saegusa S, Suk M (2006) Active flying-height control slider using MEMS thermal actuator. Microsyst Technol 12:369-375. doi:10.1007/s00542-006-0104-4
4. Kusumoto K (2007) "Technical handbook of piezoceramics. AIST (Japanese version)
5. Piezoelectric Ceramics (2006a) Fuji ceramics corporation website. http://www.fujicera.co.jp/product/e/01/index.html
6. Piezoelectric Ceramics (2006b) NEC/TOKIN corporation website. http://www.nec-tokin.com/english/product/dl-piezo.html
7. Sayer M, Judd BA, EI-Assal K, Prasad E (1981) Poling of piezoelectric ceramics. J Can Ceram Soc 50:91-310
8. Shiramatsu T, Kurita M, Miyake K, Suk M, Ohki S, Tanaka H, Saegusa S (2006) Drive integration of active flying-height control slider with micro thermal actuator. IEEE Trans Magn 42(10):2513-2515. doi:10.1109/TMAG.2006.880564
9. Shiramatsu T, Atsumi T, Kurita M, Shimizu Y, Tanaka H (2008) Dynamically controlled thermal flying-height control slider, IEEE INTERMAG 2008, HO-05
10. Storage Research Consortium (2006) SRC 21st technical review meeting general report
11. Suzuki K, Kurita M (2003) A MEMS-based active-head slider for flying height control in magnetic recording. In: The international symposium on micro-mechanical engineering (A22-022)
12. Tagawa N, Kitamura K, Mori A (2003) Design and fabrication of MEMS-based active slider using double-layered composite PZT thin film in hard disk drives. IEEE Trans Magn 39(2):926-931. doi:10.1109/TMAG.2003.808950
13. Takagi H, Matsumoto S, Maeda R (2003) Corrosion resistant and highly reliable integration technology for MEMS devices. AIST (G-04)
14. Xu BX, Hu SB, Yuan HX, Zhang J, Chen YJ, Ji R, Miao XS, Chen JS, Chong TC (2006) Thermal effect of heated magnetic disk on the slider in heat-assisted magnetic recording. J Appl Phys 99:08N102
15. Ishii K Design for manufacturability. Stanford University
16. Yeack-Scranton CE, Khanna VD, Etzold KF, Praino AP (1990) An Active slider for practical contact recording. IEEE Trans Magn 26(5):2478-2483. doi:10.1109/20.104770