SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 520, Issue 13, 2012, Pages 4305-4309

Control of aluminum doping of ZnO:Al thin films obtained by high-power impulse magnetron sputtering

(3) Tiron, V a Sirghi, L a Popa, G a

a ALEXANDRU IOAN CUZA UNIVERSITY OF IASI (Romania)

Author keywords

Aluminum; Doping; Magnetron sputtering deposition; Pulsed magnetron discharge; Transparent electrodes; Zinc oxide

Indexed keywords

AL-CONCENTRATION; AL-DOPING; ALUMINUM ELECTRODES; CRYSTALLINE GRAIN SIZE; ELECTRICAL CONDUCTIVITY; ELECTRODE BIASING; HIGH-POWER; KEY PARAMETERS; LASER ABSORPTION; MAGNETRON DISCHARGES; MAGNETRON SPUTTERING DEPOSITION; OPTIMUM VALUE; PULSED MAGNETRON DISCHARGES; TRANSPARENT ELECTRODE; VAPOR PHASE; X-RAY PHOTOELECTRONS; ZINC OXIDE (ZNO); ZNO THIN FILM; ZNO:AL FILMS; ZNO:AL THIN FILMS;

ALUMINUM COATINGS; DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY; ELECTRIC DISCHARGES; EMISSION SPECTROSCOPY; MAGNETRON SPUTTERING; METALLIC FILMS; SEMICONDUCTOR DOPING; ZINC OXIDE;

ALUMINUM;

EID: 84859156272 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2012.02.079 Document Type: Article

Times cited : (17)

References (26)

1
- 70449730669
- A. Janotti, and C.G. Van de Walle Rep. Prog. Phys. 72 2009 126501
- (2009) Rep. Prog. Phys. , vol.72 , pp. 126501
- Janotti, A.¹ Van De Walle, C.G.²

2
- 25144462707
- Ü. Özgür, Ya.I. Alivov, C. Liu, A. Teke, M.A. Reshchikov, S. Doǧan, V. Avrutin, S.-J. Cho, and H. Morkoçd J. Appl. Phys. 98 2005 041301
- (2005) J. Appl. Phys. , vol.98 , pp. 041301
- Özgür, Ü.¹ Alivov, Ya.I.² Liu, C.³ Teke, A.⁴ Reshchikov, M.A.⁵ Doǧan, S.⁶ Avrutin, V.⁷ Cho, S.-J.⁸ Morkoçd, H.⁹

3
- 65649131618
- S.P. Chang, R.W. Chuang, S.J. Chang, C.Y. Lu, Y.Z. Chiou, and S.F. Hsieh Thin Solid Films 517 2009 5050
- (2009) Thin Solid Films , vol.517 , pp. 5050
- Chang, S.P.¹ Chuang, R.W.² Chang, S.J.³ Lu, C.Y.⁴ Chiou, Y.Z.⁵ Hsieh, S.F.⁶

4
- 4344588950
- W. Gao, and Z. Li Ceram. Int. 30 2004 1155
- (2004) Ceram. Int. , vol.30 , pp. 1155
- Gao, W.¹ Li, Z.²

5
- 67650753542
- Y. Liu, Q. Li, and H. Shao Vacuum 83 2009 1435
- (2009) Vacuum , vol.83 , pp. 1435
- Liu, Y.¹ Li, Q.² Shao, H.³

6
- 0033880307
- Y. Liu, C.R. Gorla, S. Liang, N. Emanetoglu, Y. Lu, H. Shen, and M. Wraback J. Electron. Mater. 29 2000 69
- (2000) J. Electron. Mater. , vol.29 , pp. 69
- Liu, Y.¹ Gorla, C.R.² Liang, S.³ Emanetoglu, N.⁴ Lu, Y.⁵ Shen, H.⁶ Wraback, M.⁷

7
- 0033879032
- K. Elmer J. Phys. D: Appl. Phys. 33 2000 R17
- (2000) J. Phys. D: Appl. Phys. , vol.33 , pp. 17
- Elmer, K.¹

8
- 77953249626
- A.P. Ehiasarian Pure Appl. Chem. 82 2010 1247
- (2010) Pure Appl. Chem. , vol.82 , pp. 1247
- Ehiasarian, A.P.¹

9
- 84859164496
- World Patent No. WO 2005/090632
- M. Ganciu, M. Hecq, S. Konstantinidis, J.P. Dauchot, M. Touzeau, L. de Poucques, J. Bretagne, World Patent No. WO 2005/090632.
- Ganciu, M.¹ Hecq, M.² Konstantinidis, S.³ Dauchot, J.P.⁴ Touzeau, M.⁵ De Poucques, L.⁶ Bretagne, J.⁷

10
- 0037134190
- A.P. Ehiasarian, R. New, W.D. Munz, L. Hultman, U. Helmersson, and V. Kouznetsov Vacuum 65 2002 147
- (2002) Vacuum , vol.65 , pp. 147
- Ehiasarian, A.P.¹ New, R.² Munz, W.D.³ Hultman, L.⁴ Helmersson, U.⁵ Kouznetsov, V.⁶

11
- 34249887899
- S. Konstantinidis, A. Hemberg, J.P. Dauchot, and M. Hecq J. Vac. Sci. Technol. B 25 2007 L19
- (2007) J. Vac. Sci. Technol. B , vol.25 , pp. 19
- Konstantinidis, S.¹ Hemberg, A.² Dauchot, J.P.³ Hecq, M.⁴

12
- 42649093542
- F. Ruske, A. Pflug, V. Sittinger, W. Werner, B. Szyszka, and D.J. Christie Thin Solid Films 516 2008 4472
- (2008) Thin Solid Films , vol.516 , pp. 4472
- Ruske, F.¹ Pflug, A.² Sittinger, V.³ Werner, W.⁴ Szyszka, B.⁵ Christie, D.J.⁶

13
- 28344453533
- A. Janotti, and C.G. Van de Walle Appl. Phys. Lett. 87 2005 122102
- (2005) Appl. Phys. Lett. , vol.87 , pp. 122102
- Janotti, A.¹ Van De Walle, C.G.²

14
- 20144369109
- L.S. Vlasenko, and G.D. Watkins Phys. Rev. B 71 2005 12521
- (2005) Phys. Rev. B , vol.71 , pp. 12521
- Vlasenko, L.S.¹ Watkins, G.D.²

15
- 34247516340
- L. Schmidt-Mende, and J.L. MacManus-Driscoll Mater. Today 10 2007 40
- (2007) Mater. Today , vol.10 , pp. 40
- Schmidt-Mende, L.¹ MacManus-Driscoll, J.L.²

16
- 0010059052
- S.B. Zhang, S.H. Wei, and A. Zunger Phys. Rev. B 63 2001 075205
- (2001) Phys. Rev. B , vol.63 , pp. 075205
- Zhang, S.B.¹ Wei, S.H.² Zunger, A.³

17
- 22144450704
- M. Wolter, H.T. Do, H. Steffen, and R. Hippler J. Phys. D: Appl. Phys. 38 2005 2390
- (2005) J. Phys. D: Appl. Phys. , vol.38 , pp. 2390
- Wolter, M.¹ Do, H.T.² Steffen, H.³ Hippler, R.⁴

18
- 0000288835
- Y. Chen, D.M. Bagnall, H.J. Koh, K.T. Park, K. Hiraga, Z.Q. Zhu, and T. Yao J. Appl. Phys. 84 1998 3912
- (1998) J. Appl. Phys. , vol.84 , pp. 3912
- Chen, Y.¹ Bagnall, D.M.² Koh, H.J.³ Park, K.T.⁴ Hiraga, K.⁵ Zhu, Z.Q.⁶ Yao, T.⁷

19
- 0001185215
- D.C. Reynolds, D.C. Look, B. Jobai, C.W. Litton, T.C. Collins, W. Harsch, and G. Cantwell Phys. Rev. B 57 1998 12151
- (1998) Phys. Rev. B , vol.57 , pp. 12151
- Reynolds, D.C.¹ Look, D.C.² Jobai, B.³ Litton, C.W.⁴ Collins, T.C.⁵ Harsch, W.⁶ Cantwell, G.⁷

20
- 0002081496
- K. Vanheusden, W.L. Warren, C.H. Seager, D.R. Tallant, J.A. Voigt, and B.E. Gnade J. Appl. Phys. 79 1996 7983
- (1996) J. Appl. Phys. , vol.79 , pp. 7983
- Vanheusden, K.¹ Warren, W.L.² Seager, C.H.³ Tallant, D.R.⁴ Voigt, J.A.⁵ Gnade, B.E.⁶

21
- 21544480100
- M. Liu, A.H. Kitai, and P. Mascher J. Lumin. 54 1992 35
- (1992) J. Lumin. , vol.54 , pp. 35
- Liu, M.¹ Kitai, A.H.² Mascher, P.³

22
- 0014577305
- R. Dingle Phys. Rev. Lett. 23 1969 579
- (1969) Phys. Rev. Lett. , vol.23 , pp. 579
- Dingle, R.¹

23
- 79958190246
- N.Y. Garces, L. Wang, L. Bai, N.C. Giles, L.E. Halliburton, and G. Cantwell Appl. Phys. Lett. 81 2002 622
- (2002) Appl. Phys. Lett. , vol.81 , pp. 622
- Garces, N.Y.¹ Wang, L.² Bai, L.³ Giles, N.C.⁴ Halliburton, L.E.⁵ Cantwell, G.⁶

24
- 0004121205
- Chemical Rubber Cleveland
- S. Shionoya, and W.M. Yen Phosphor Handbook 1999 Chemical Rubber Cleveland
- (1999) Phosphor Handbook
- Shionoya, S.¹ Yen, W.M.²

25
- 0142109458
- Z.K. Tang, G.K.L. Wong, and P. Yu Appl. Phys. Lett. 72 1998 3270
- (1998) Appl. Phys. Lett. , vol.72 , pp. 3270
- Tang, Z.K.¹ Wong, G.K.L.² Yu, P.³

26
- 33344473579
- V. Musat, B. Teixeira, E. Fortunato, and R.C.C. Monteiro Thin Solid Films 502 2006 219
- (2006) Thin Solid Films , vol.502 , pp. 219
- Musat, V.¹ Teixeira, B.² Fortunato, E.³ Monteiro, R.C.C.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.