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Volumn 520, Issue 12, 2012, Pages 4110-4113
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Deposition of indium tin oxide by atmospheric pressure chemical vapour deposition
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Author keywords
APCVD; Chemical vapour deposition; Indium tin oxide; Photovoltaics; Transparent conductive oxide
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Indexed keywords
APCVD;
CHEMICAL VAPOUR DEPOSITION;
INDIUM TIN OXIDE;
PHOTOVOLTAICS;
TRANSPARENT CONDUCTIVE OXIDES;
ATMOSPHERIC PRESSURE;
CHEMICAL VAPOR DEPOSITION;
TIN;
TIN OXIDES;
VAPORS;
INDIUM COMPOUNDS;
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EID: 84858699924
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2011.04.191 Document Type: Conference Paper |
Times cited : (27)
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References (16)
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