Thermoelectric characterization and power generation using a silicon-on-insulator substrate

Journal of Microelectromechanical Systems

Volumn 21, Issue 1, 2012, Pages 4-6

  Lee, Jaeho ^a   Kim, Sangbum ^b,c   Marconnet, Amy ^a   In'T Zandt, M A A ^d   Asheghi, Mehdi ^a   Philip Wong, H S Philip ^a   Goodson, Kenneth E ^a  

^a Stanford University   (United States)

^b STANFORD UNIVERSITY   (United States)

^c IBM T J WATSON RESEARCH CENTER   (United States)

^d NXP SEMICONDUCTORS   (Netherlands)

Author keywords

On chip power generation; SbTe; Seebeck coefficient measurement; silicon on insulator (SOI); thermoelectric power generation (TEG)

Indexed keywords

COMPETING DESIGNS; FREE STANDING MEMBRANES; METAL-SEMICONDUCTOR STRUCTURES; ON CHIPS; PHASE CHANGES; SBTE; SEEBECK COEFFICIENT MEASUREMENT; SILICON-ON-INSULATOR SUBSTRATES; SILICON-ON-INSULATORS; THERMOELECTRIC CHARACTERIZATION; THERMOELECTRIC VOLTAGE;

PHASE CHANGE MEMORY; THERMOCOUPLES; THERMOELECTRIC POWER;

THERMAL GRADIENTS;

EID: 84858442403     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2175704     Document Type: Article

References (13)

1. R. Venkatasubramanian, E. Sivola, T. Colpitts, and B. O'Quinn, "Thinfilm thermoelectric devices with high room-temperature figures of merit," Nature, vol. 413, no. 6856, pp. 597-602, Oct. 2001. (Pubitemid 32964053)
2. D. T. Castro, L. Goux, G. A. M. Hurkx, K. Attenborough, R. Delhougne, J. Lisoni, F. J. Jedema, M. A. A. t Zandt, R. A. M. Wolters, and D. J. Gravesteijn, "Evidence of the thermo-electric Thomson effect and influence on the program conditions and cell optimization in phase-change memory cells," in IEDM Tech. Dig., 2007, pp. 315-318.
3. D.-S. Suh, C. Kim, K. H. P. Kim, Y.-S. Kang, T.-Y. Lee, Y. Khang, T. S. Park, Y.-G. Yoon, J. Im, and J. Ihm, "Thermoelectric heating of Ge2Sb2Te5 in phase change memory devices," Appl. Phys. Lett., vol. 96, no. 12, pp. 123 115-1-123 115-3, Mar. 2010.
4. Z. Bian, A. Shakouri, L. Shi, H. K. Lyeo, and C. K. Shih, "Three dimensional modeling of nanoscale Seebeck measurements by scanning thermoelectric microscopy," Appl. Phys. Lett., vol. 87, no. 5, pp. 053 115-1-053 115-3, Aug. 2005.
5. B. Yang,W. L. Liu, J. L. Liu, K. L.Wang, and G. Chen, "Measurements of anisotropic thermoelectric properties in superlattices," Appl. Phys. Lett., vol. 81, no. 19, pp. 3588-3590, Nov. 2002.
6. M. Von Arx, O. Paul, and H. Baltes, "Test structures to measure the Seebeck coefficient of cmos IC polysilicon," IEEE Trans. Semicond. Manuf., vol. 10, no. 2, pp. 201-208, May 1997. (Pubitemid 127763250)
7. L. Shi, D. Li, C. Yu, W. Jang, D. Kim, Z. Yao, P. Kim, and A. Majumdar, "Measuring thermal and thermoelectric properties of one-dimensional nanostructures using a microfabricated device," J. Heat Transf., vol. 125, no. 5, pp. 881-888, Oct. 2003. (Pubitemid 37348087)
8. A. Mavrokefalos, M. T. Pettes, F. Zhou, and L. Shi, "Four-probe measurements of the in-plane thermoelectric properties of nanofilms," Rev. Sci. Instrum., vol. 78, no. 3, pp. 034 901-1-034 901-6, Mar. 2007.
9. A. Boukai, Y. Bunimovich, J. Tahir-kheli, J. Yu, W. Goddard, and J. Health, "Silicon nanowires as efficient thermoelectric materials," Nature, vol. 451, no. 7175, pp. 168-171, Jan. 2008.
10. J. Xie, C. Lee, M. F. Wang, Y. Liu, and H. H. Feng, " Characterization of heavily doped polysilicon films for CMOS-MEMS thermoelectric power generators," J. Micromech. Microeng., vol. 19, no. 12, p. 125 029, Dec. 2009.
11. M. Strasser, R. Aigner, C. Lauterbach, T. F. Sturm, M. Franosch, and G. Wachutka, "Micromachined CMOS thermoelectric generators as onchip power supply," Sens. Actuators A, Phys., vol. 114, no. 2/3, pp. 362-370, Sep. 2004.
12. A. Jacquot, G. Chen, H. Scherrer, A. Dauscher, and B. Lenoir, "Modeling of on-membrane thermoelectric power supplies," Sens. Actuators A, Phys., vol. 116, no. 3, pp. 501-508, Oct. 2004.
13. M. Asheghi, Y. K. Leung, S. S. Wong, and K. E. Goodson, "Phononboundary scattering in thin silicon layers," Appl. Phys. Lett., vol. 71, no. 1800, pp. 1798-1800, Sep. 1997. (Pubitemid 127638810)