The optical properties of Ti-doped TiO 2 nanoceramic films deposited by simultaneous rf and dc magnetron sputtering

Ceramics International

Volumn 38, Issue 4, 2012, Pages 3129-3134

  Lin, Su Shia ^a  

^a NATIONAL CHI NAN UNIVERSITY   (Taiwan)

Author keywords

Films; Optical energy gap; Power; Refractive index; Sputtering; Substrate temperature

Indexed keywords

ABSORPTION EDGES; ATOMIC RATIO; BLUE SHIFT; DC MAGNETRON SPUTTERING; DC POWER; DEFLECTOMETRY; DEPOSITED FILMS; LOW SUBSTRATE TEMPERATURE; NANO CERAMICS; NONLINEAR REFRACTIVE INDEX; OPTICAL ENERGY GAP; POWER; RF-MAGNETRON SPUTTERING; SUBSTRATE TEMPERATURE; TIO;

DC POWER TRANSMISSION; ENERGY GAP; FILMS; MAGNETRON SPUTTERING; REFRACTIVE INDEX; SOLIDS; SPUTTERING; SUBSTRATES; SURFACE ROUGHNESS; TITANIUM; TITANIUM DIOXIDE;

OPTICAL FILMS;

EID: 84858078613     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2011.12.014     Document Type: Article

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