The properties of Al-doped TiO2 nanoceramic films deposited by simultaneous rf and dc magnetron sputtering

Ceramics International

Volumn 36, Issue 1, 2010, Pages 87-91

  Lin, Su Shia ^a   Wu, Ding Kun ^a  

^a NATIONAL CHI NAN UNIVERSITY   (Taiwan)

Author keywords

Films; Refractive index; Sputtering; Transmission

Indexed keywords

AL CONTENT; AL FILMS; DC MAGNETRON SPUTTERING; DEFLECTOMETRY; DEPOSITED FILMS; DOPED-TIO; GLASS SUBSTRATES; LOW POROSITY; NANO CERAMICS; NANOCRYSTALLINITY; NONLINEAR REFRACTIVE INDEX; OPTICAL ENERGY GAP; PROPERTIES OF AL; RF-MAGNETRON SPUTTERING; TIO;

LIGHT REFRACTION; LIGHT TRANSMISSION; MAGNETRON SPUTTERING; MAGNETRONS; METALLIC FILMS; ORGANIC POLYMERS; REFRACTIVE INDEX; REFRACTOMETERS;

ALUMINUM;

EID: 70350721802     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2009.06.023     Document Type: Article

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