Effect of substrate temperature on the properties of TiO 2 nanoceramic films

Ceramics International

Volumn 38, Issue 3, 2012, Pages 2461-2466

  Lin, Su Shia ^a  

^a NATIONAL CHI NAN UNIVERSITY   (Taiwan)

Author keywords

Film; Refractive index; Sputtering; Substrate temperature; Transmission

Indexed keywords

DEFLECTOMETRY; DEPOSITED FILMS; GLASS SUBSTRATES; GRAIN SIZE; HYDROPHILIC PROPERTIES; NANO CERAMICS; NONLINEAR REFRACTIVE INDEX; NONSTOICHIOMETRIC; OPTICAL ENERGY GAP; RF-MAGNETRON SPUTTERING; SUBSTRATE TEMPERATURE; TIO;

FILMS; MAGNETRON SPUTTERING; REFRACTIVE INDEX; SPUTTERING; TITANIUM DIOXIDE; TRANSMISSIONS;

SUBSTRATES;

EID: 84857060953     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2011.11.014     Document Type: Article

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