Optimization of fluidic microchannel manufacturing processes in low temperature co-fired ceramic substrates

Periodica Polytechnica Electrical Engineering

Volumn 54, Issue 1-2, 2010, Pages 79-86

  Horváth, Eszter ^a   Harsányi, Gábor ^a  

^a BUDAPEST UNIVERSITY OF TECHNOLOGY AND ECONOMICS   (Hungary)

Author keywords

Firing; Fluidic channel; Lamination; LTCC; Scanning acoustic microscopy

Indexed keywords

ACOUSTIC MICROSCOPES; FLUIDIC DEVICES; LAMINATING; SUBSTRATES; THERMOANALYSIS;

FIRING; FLUIDIC CHANNEL; LAMINATION; LTCC; SCANNING ACOUSTIC MICROSCOPY;

FABRICATION;

EID: 84856908386     PISSN: 03246000     EISSN: 15873781     Source Type: Journal    
DOI: 10.3311/pp.ee.2010-1-2.08     Document Type: Article

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