Microchannel fabrication process in LTCC ceramics

Microelectronics Reliability

Volumn 48, Issue 6, 2008, Pages 866-871

  Malecha, Karol ^a   Golonka, Leszek J ^a  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

BUILDING MATERIALS; CARBON; CARBON BLACK; CERAMIC MATERIALS; COBALT; COBALT COMPOUNDS; ELECTRON BEAM LITHOGRAPHY; ELECTRON MICROSCOPES; LAMINATING; MECHANICAL PROPERTIES; MICROFLUIDICS; MICROSCOPES; PIGMENTS; SCANNING; STRUCTURAL PROPERTIES; SUPPORT VECTOR MACHINES;

(PL) PROPERTIES; CETYL ALCOHOL; ELSEVIER (CO); LAMINATION PROCESS; LOW TEMPERATURE CO-FIRED CERAMIC (LTCC); LTCC CERAMICS; MICRO CHANNEL FABRICATION; MICROCHANNEL WIDTHS; SCANNING ELECTRON MICROSCOPE (SEM); SIMPLE METHODS; TEST STRUCTURES;

MICROCHANNELS;

ASSEMBLY; BUILDINGS; CARBON BLACK; CERAMICS; COBALT COMPOUNDS; COMPUTATION; ELECTRON MICROSCOPES; LAMINATION; LITHOGRAPHY; MECHANICAL PROPERTIES; MICROANALYSIS; PIGMENT; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; WIDTH;

EID: 45849103508     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2008.03.013     Document Type: Article

References (11)

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