Optimization of cavity fabrication for micro-fluidic systems

2008 31st International Spring Seminar on Electronics Technology: Reliability and Life-time Prediction, ISSE 2008

Volumn , Issue , 2008, Pages 414-419

  Wang, X S ^a   Balluch, B ^a   Smetana, W ^a   Stangl, G ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

CHANNEL GEOMETRY; CHANNEL WIDTHS; FABRICATION PROCESS; LAMINATION PRESSURE; LASER MACHINING; LOW TEMPERATURE CO-FIRED CERAMICS; PROCESSING PARAMETERS; SINGLE-STEP; TEST CHANNEL;

ASPECT RATIO; FABRICATION; LAMINATING; MACHINING; THERMOGRAVIMETRIC ANALYSIS;

OPTIMIZATION;

EID: 71249148528     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISSE.2008.5276640     Document Type: Conference Paper

References (1)

1. H. Birol, T. Maeder, C. Jacq, S. Straessler, P. Ryser, "Fabrication of Low-Temperature Co-fired Ceramics micro-fluidic devices using sacrificial carbon layers", Int. J. Appl. Ceram. Technol., 2 [5] (2005), 364.