메뉴 건너뛰기




Volumn 29, Issue 13, 2009, Pages 2737-2745

Study of deformation and porosity evolution of low temperature co-fired ceramic for embedded structures fabrication

Author keywords

Low temperature co fired ceramic; Porosity; Sensors; Sintering; Substrate

Indexed keywords

CARBON MATERIAL; CAVITY WIDTH; DEFORMATION BEHAVIOR; EMBEDDED STRUCTURES; LAMINATE THICKNESS; LOW TEMPERATURE CO-FIRED CERAMIC; LOW-TEMPERATURE CO-FIRED CERAMICS; OPEN POROSITY; PROCESS OPTIMIZATION; SINTERING TEMPERATURES;

EID: 67349201376     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2009.03.009     Document Type: Article
Times cited : (16)

References (22)
  • 4
    • 33745969533 scopus 로고    scopus 로고
    • Processing of graphite-based sacrificial layer for microfabrication of low temperature co-fired ceramics (LTCC)
    • Birol H., Maeder T., and Ryser P. Processing of graphite-based sacrificial layer for microfabrication of low temperature co-fired ceramics (LTCC). Sensors and Actuators A 130-131 (2006) 560-567
    • (2006) Sensors and Actuators A , vol.130-131 , pp. 560-567
    • Birol, H.1    Maeder, T.2    Ryser, P.3
  • 6
    • 50049118215 scopus 로고
    • Method of fabricating a multilayer electrical circuit
    • US Patent No. 5,249,355, October 5
    • Miehls, D. J., Martin, F. J., Pond, R. G. and Fleischner, P. S., Method of fabricating a multilayer electrical circuit. US Patent No. 5,249,355, October 5, 1993.
    • (1993)
    • Miehls, D.J.1    Martin, F.J.2    Pond, R.G.3    Fleischner, P.S.4
  • 7
    • 0034883855 scopus 로고    scopus 로고
    • New lamination technique to join ceramic green tapes for the manufacturing of multilayer devices
    • Roosen A. New lamination technique to join ceramic green tapes for the manufacturing of multilayer devices. Journal of the European Ceramic Society 21 (2001) 1993-1996
    • (2001) Journal of the European Ceramic Society , vol.21 , pp. 1993-1996
    • Roosen, A.1
  • 9
    • 50049123159 scopus 로고    scopus 로고
    • Method for fabricating a multilayered structure and the structures formed by the method
    • US Patent No. 6,592,696, July 15
    • Burdon, J. W., Huang, R.-F., Wilcox, D. and Naclerio, N. J., Method for fabricating a multilayered structure and the structures formed by the method. US Patent No. 6,592,696, July 15, 2003.
    • (2003)
    • Burdon, J.W.1    Huang, R.-F.2    Wilcox, D.3    Naclerio, N.J.4
  • 10
    • 50049108523 scopus 로고    scopus 로고
    • Method of constructing three dimensional bodies from lamination
    • US Patent No. 5,777,833, July 14
    • Cawley, J. D., Heuer, A. H. and Newman, W. S., Method of constructing three dimensional bodies from lamination. US Patent No. 5,777,833, July 14, 1998.
    • (1998)
    • Cawley, J.D.1    Heuer, A.H.2    Newman, W.S.3
  • 11
    • 50049085992 scopus 로고
    • Ceramic monolithic structure having an internal cavity contained therein and a method of preparing the same
    • US Patent No. 4,806,295
    • Trickett, E. A. and Assmus, R. C., Ceramic monolithic structure having an internal cavity contained therein and a method of preparing the same. US Patent No. 4,806,295, 1989.
    • (1989)
    • Trickett, E.A.1    Assmus, R.C.2
  • 12
    • 50049120943 scopus 로고    scopus 로고
    • Method of making ceramic article with cavity using LTCC tape,
    • US Patent No. 5,601,673
    • Alexander, J. H., Method of making ceramic article with cavity using LTCC tape, US Patent No. 5,601,673, 1997.
    • (1997)
    • Alexander, J.H.1
  • 14
    • 56249111617 scopus 로고    scopus 로고
    • Carbon burnout and densification of self-constrained LTCC for fabrication of embedded structures in a multi-layer platform
    • Khoong L.E., Tan Y.M., and Lam Y.C. Carbon burnout and densification of self-constrained LTCC for fabrication of embedded structures in a multi-layer platform. Journal of the European Ceramic Society 29 (2009) 457-463
    • (2009) Journal of the European Ceramic Society , vol.29 , pp. 457-463
    • Khoong, L.E.1    Tan, Y.M.2    Lam, Y.C.3
  • 17
    • 0342483882 scopus 로고    scopus 로고
    • Densification and shape retention in supersolidus liquid phase sintering
    • Liu J., Lal A., and German R.M. Densification and shape retention in supersolidus liquid phase sintering. Acta Materialia 47 (1999) 4615-4626
    • (1999) Acta Materialia , vol.47 , pp. 4615-4626
    • Liu, J.1    Lal, A.2    German, R.M.3
  • 21
    • 0001840557 scopus 로고
    • Practical use of mercury porosimetry in the study of porous solids
    • Moscou L., and Lub S. Practical use of mercury porosimetry in the study of porous solids. Powder Technology 29 (1981) 45-52
    • (1981) Powder Technology , vol.29 , pp. 45-52
    • Moscou, L.1    Lub, S.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.