Fabrication of low-temperature co-fired ceramics micro-fluidic devices using sacrificial carbon layers

International Journal of Applied Ceramic Technology

Volumn 2, Issue 5, 2005, Pages 364-373

  Birol, Hansu ^a   Maeder, T ^a   Jacq, C ^a   Straessler, S ^a   Ryser, P ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

DILATOMETERS; FLUIDIC DEVICES; MICROELECTROMECHANICAL DEVICES; SCANNING ELECTRON MICROSCOPY; THERMOGRAVIMETRIC ANALYSIS;

LOW TEMPERATURE CO-FIRED CERAMICS; MICROFLUIDIC DEVICES; SACRIFICIAL LAYER METHOD;

CERAMIC MATERIALS;

EID: 27844442229     PISSN: 1546542X     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1744-7402.2005.02036.x     Document Type: Article

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