Vertical channel thin film transistor technology: Similar approach with 3D-ULSI monolithic Technology

ECS Transactions

Volumn 22, Issue 1, 2009, Pages 293-304

  Bonnaud, Olivier ^a  

^a UNIVERSITÉ DE RENNES 1   (France)

Author keywords

[No Author keywords available]

Indexed keywords

SUBSTRATES; THIN FILM TRANSISTORS; THIN FILMS; ULSI CIRCUITS;

EQUIVALENT CURRENT DENSITY; MONOLITHIC TECHNOLOGIES; SCIENTIFIC PRINCIPLES; SILICON TECHNOLOGIES; SUBSTRATE SURFACE; THIN-FILM TECHNOLOGY; THREE DIMENSIONAL GEOMETRY; VERTICAL CHANNELS;

THIN FILM CIRCUITS;

EID: 84856894507     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.3152986     Document Type: Conference Paper

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