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Volumn 16, Issue 9, 2009, Pages 165-170
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A vertical Thin Film Transistor based on low temperature technology (T<600°C)
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Author keywords
[No Author keywords available]
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Indexed keywords
DRAIN CURRENT;
FIELD EFFECT TRANSISTORS;
LEAKAGE CURRENTS;
POLYCRYSTALLINE MATERIALS;
POLYSILICON;
SUBSTRATES;
TEMPERATURE;
THIN FILM CIRCUITS;
THIN FILMS;
THRESHOLD VOLTAGE;
VAPOR DEPOSITION;
AVERAGE CURRENTS;
CHANNEL WIDTHS;
DOPED POLYSILICON;
GATE-LEAKAGE CURRENT;
GLASS SUBSTRATES;
LOW TEMPERATURE TECHNOLOGY;
LOW- TEMPERATURE PROCESS;
VERTICAL THIN-FILM TRANSISTORS;
THIN FILM TRANSISTORS;
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EID: 63149179321
PISSN: 19385862
EISSN: 19386737
Source Type: Conference Proceeding
DOI: 10.1149/1.2980546 Document Type: Conference Paper |
Times cited : (13)
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References (11)
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