A novel 50 nm vertical MOSFET with a dielectric pocket

Solid-State Electronics

Volumn 50, Issue 5, 2006, Pages 897-900

  Jayanarayanan, S K ^a   Dey, S ^a   Donnelly, J P ^a   Banerjee, S K ^a  

^a The University of Texas at Austin   (United States)

Author keywords

Dielectric pocket; Shallow junctions; Short channel effects; Vertical MOSFET

Indexed keywords

DIELECTRIC PROPERTIES; DIFFUSION; SEMICONDUCTOR DOPING; SEMICONDUCTOR JUNCTIONS;

DIELECTRIC POCKETS; SHALLOW JUNCTIONS; SHORT CHANNEL EFFECTS; VERTICAL MOSFET;

MOSFET DEVICES;

EID: 33744937051     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2006.04.003     Document Type: Article

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