Polycrystalline silicon thin film transistors: State of the art and improvement of electrical characteristics

Solid State Phenomena

Volumn 67, Issue , 1999, Pages 529-540

  Bonnaud, O ^a  

^a Grp Microlectron et Visualisation   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SILICON; CRYSTALLIZATION; EXCIMER LASERS; GRAIN BOUNDARIES; POLYCRYSTALLINE MATERIALS; RAPID THERMAL ANNEALING; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SUBSTRATES;

LASER CRYSTALLIZATION; POLYCRYSTALLINE SILICON;

THIN FILM TRANSISTORS;

EID: 0032680492     PISSN: 10120394     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.4028/www.scientific.net/ssp.67-68.529     Document Type: Article

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