CNT manipulation: Inserting a carbonaceous dielectric layer beneath using electron beam induced deposition

Journal of Nanoscience and Nanotechnology

Volumn 11, Issue 2, 2011, Pages 1025-1029

  Kurra, Narendra ^a   Vijaykumar, T ^a   Kulkarni, G U ^a  

^a JAWAHARLAL NEHRU CENTRE FOR ADVANCED SCIENTIFIC RESEARCH   (India)

Author keywords

Carbonaceous deposition; CNT circuits; Conducting AFM; Electron beam induced deposition; Electron beam lithography

Indexed keywords

BEAM ENERGIES; CARBONACEOUS LAYERS; CONDUCTING AFM; DIELECTRIC LAYER; E-BEAMS; ELECTRON BEAM INDUCED DEPOSITION; PRESENCE OF WATER; SI SUBSTRATES; TOP SURFACE;

ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; HYDROCARBONS; NANOTUBES;

DEPOSITION;

EID: 84856845123     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2011.3112     Document Type: Conference Paper

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