Effects of substrate temperature on the ion conductivity of hydrated ZrO 2 thin films prepared by reactive sputtering in H 2O atmosphere

Solar Energy Materials and Solar Cells

Volumn 99, Issue , 2012, Pages 160-165

  Li, Ning ^a   Suzuki, Miki ^a   Abe, Yoshio ^a   Kawamura, Midori ^a   Sasaki, Katsutaka ^a   Itoh, Hidenobu ^a   Suzuki, Tsutomu ^a  

^a KITAMI INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

AC impedance; Hydrated ZrO 2 thin films; Ion conductivity; Reactive sputtering; Substrate temperature

Indexed keywords

ABSORBANCE PEAK; AC-IMPEDANCE; CHEMICAL BONDING STATE; DIFFERENT SUBSTRATES; FILM DENSITY; ION CONDUCTIVITIES; ION CONDUCTIVITY; OH GROUP; REACTIVE GAS; SUBSTRATE TEMPERATURE;

ATMOSPHERIC TEMPERATURE; CHEMICAL BONDS; CRYSTAL STRUCTURE; HYDRATION; HYDROGEN; IONS; REACTIVE SPUTTERING; REFRACTIVE INDEX; SUBSTRATES; THIN FILMS; ZIRCONIUM ALLOYS;

FILM PREPARATION;

EID: 84856543485     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2011.03.037     Document Type: Article

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