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Surface and Coatings Technology

Volumn 100-101, Issue 1-3, 1998, Pages 411-414

Pulsed laser deposition of ceramic thin films using different laser sources

(4) Husmann, A a Gottmann, J a Klotzbucher T a Kreutz, E W a

a RWTH AACHEN UNIVERSITY (Germany)

Author keywords

CO2 laser; Excimer laser; Pulsed laser deposition; Thin film

Indexed keywords

ALUMINA; CARBON DIOXIDE LASERS; DEPOSITION; EXCIMER LASERS; HARDNESS; MORPHOLOGY; PULSED LASER APPLICATIONS; REFRACTIVE INDEX; SILICON; STEEL; SURFACE ROUGHNESS; THIN FILMS;

LASER ACOUSTIC METHOD; NANOINDENTATION TESTS; PULSED LASER DEPOSITION;

CERAMIC COATINGS;

EID: 0032021650 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(97)00660-9 Document Type: Article

Times cited : (24)

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