Effect of heat treatment on ion conductivity of hydrated ZrO2 thin films prepared by reactive sputtering using H2O gas

Japanese Journal of Applied Physics

Volumn 50, Issue 4 PART 1, 2011, Pages

  Li, Ning ^a   Abe, Yoshio ^a   Kawamura, Midori ^a   Sasaki, Katsutaka ^a   Itoh, Hidenobu ^a   Suzuki, Tsutomu ^a  

^a KITAMI INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORBANCE PEAK; ABSORPTION PEAKS; AC IMPEDANCE MEASUREMENT; AFTER-HEAT TREATMENT; BEFORE AND AFTER; ION CONDUCTIVITIES; IONIC SPECIES; OH GROUP; PEAK INTENSITY;

FOURIER TRANSFORM INFRARED SPECTROSCOPY; HEAT TREATMENT; HYDRATION; IONS; THIN FILMS; ZIRCONIUM ALLOYS;

FILM PREPARATION;

EID: 79955131046     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.50.045804     Document Type: Article

References (28)

1. K. Tanabe, T. Seiyama, and K. Fueki: Kinzoku Sankabutsu to Fukugo Sankabutsu (Metal Oxides and Composite Oxides) (Kodansha, Tokyo, 1978 119 [in Japanese].
2. H. K. Pulker: Coatings on Glass (Elsevier, Amsterdam, 1999) 410.
3. M. G. Krishna, K. N. Rao, and S. Mohan: Thin Solid Films 193-194 (1990) 690.
4. S. Shao, Z. Fan, J. Shao, and H. He: Thin Solid Films 445 (2003) 59.
5. A. Husmann, J. Gottmann, T. Klotzbücher, and E. W. Kreutz: Surf. Coat. Technol. 100-101 (1998) 411.
6. M. G. Krishna, K. N. Rao, and S. Mohan: Thin Solid Films 207 (1992) 248.
7. A. Mehner, H. Klümper-Westkamp, F. Hoffmann, and Mayr: Thin Solid Films 308-309 (1997) 363.
8. R. Brenier, C. Urlacher, J. Mugnier, and M. Brunel: Thin Solid Films 338 (1999) 136.
9. J. S. Kim, H. A. Marzouk, and J. Reucroft: Thin Solid Films 254 (1995) 33.
10. N. Iwamoto, Y. Makino, and M. Kamai: Thin Solid Films 153 (1987) 233.
11. M. Boulouz, A. Boulouz, A. Giani, and A. Boyer: Thin Solid Films 323 (1998) 85.
12. K. P. S. S. Hembram, G. Dutta, U. V. Waghmare, and G. M. Rao: Physica B 399 (2007) 21.
13. W. A. England, M. G. Cross, A. Hamnett, J. Wiseman, and J. B. Goodenough: Solid State Ionics 1 (1980) 231.
14. S. H. Kim, J. H. Ko, S. H. Ji, J. S. Kim, S. S. Kang, M.-J. Lee, and Y. S. Yoon: Jpn. J. Appl. Phys. 45 (2006) 5144.
15. A.-L. Larsson and G. A. Niklasson: Sol. Energy Mater. Sol. Cells 84 (2004) 351.
16. V. M. M. Mercier and van der Sluis: Solid State Ionics 145 (2001) 17.
17. R. Armitage, M. Rubin, T. Richardson, N. O'Brien, and Y. Chen: Appl. Phys. Lett. 75 (1999) 1863.
18. Y. Abe, F. Peng, Y. Takiguchi, M. Kawamura, K. Sasaki, H. Itoh, and T. Suzuki: Jpn. J. Appl. Phys. 47 (2008) 7269.
19. D. R. Lide: CRC Handbook of Chemistry and Physics (CRC Press, Boca Raton, FL, 2003) 84th ed., Sect. 10.
20. R. W. B. Pearse and A. G. Gaydon: The Identification of Molecular Spectra (Chapman and Hall, London, 1976) 261.
21. International Center for Diffraction Data (ICDD), Powder Diffraction File (PDF)-2, Release 2009, reference code 00-037-1484.
22. G. Štefanić, S. Musić, and A. Gajović: J. Mol. Struct. 744-747 (2005) 541.
23. I. I.Š tefanć, S. Musić, G. Štefanić, and A. Gajović: J. Mol. Struct. 480-481 (1999) 621.
24. Y. Sone, A. Kishimoto, and T. Kudo: Solid State Ionics 66 (1993) 53.
25. M. Takeuchi and M. Anpo: Materials Integration 19 (2006) 35 [in Japanese].
26. M. R. Querry, D. M. Wieliczka, and D. J. Seselsteim: in Handbook of Optical Constants of Solids II, ed. E. D. Palik (Academic Press, San Diego, CA, 1991) 1059.
27. R. Jacobsson: in Physics of Thin Films, ed. G. Hass, M. H. Francombe, and R. W. Hoffman (Academic Press, New York, 1975) Vol. 8, 51.
28. T. Osaka, N. Oyama, and T. Ohsaka: Denki Kagaku Ho-Kiso Sokutei Manual (Electrochemical Method-Manual of Fundamental Measurement) (Kodansha, Tokyo, 2002) 94 [in Japanese].