Integrated optofluidic microsystem based on vertical high-order one-dimensional silicon photonic crystals

Microfluidics and Nanofluidics

Volumn 12, Issue 1-4, 2012, Pages 545-552

  Barillaro, G ^a   Merlo, S ^b   Surdo, S ^a   Strambini, L M ^a   Carpignano, F ^b  

^a UNIVERSITY OF PISA   (Italy)

^b UNIVERSITY OF PAVIA   (Italy)

Author keywords

Microsystem; Optofluidics; Photonic crystals; Refractive index

Indexed keywords

AIR-GAPS; BAND GAPS; GLASS COVERS; HIGH ASPECT RATIO; HIGH SENSITIVITY; HIGH-ORDER; IN-PLANE; LIQUID INJECTIONS; MICROMACHINED SILICON; NEAR INFRARED REGION; ONE-DIMENSIONAL (1D) PHOTONIC CRYSTALS; OPTO-FLUIDICS; REFLECTIVITY SPECTRA; REFRACTIVE INDEX CHANGES; REFRACTIVE INDEX SENSOR; SENSITIVITY VALUES; SILICON PHOTONIC CRYSTALS; THEORETICAL PREDICTION; WAVELENGTH SHIFT; WITH INLETS;

ASPECT RATIO; EMISSION SPECTROSCOPY; LIQUIDS; MICROSYSTEMS; PHOTONIC DEVICES; REFRACTIVE INDEX;

PHOTONIC CRYSTALS;

EID: 84856230278     PISSN: 16134982     EISSN: 16134990     Source Type: Journal    
DOI: 10.1007/s10404-011-0896-0     Document Type: Article

References (26)

1. G Barillaro A Nannini F Pieri 2002 Dimensional constraints on high aspect ratio silicon microstructures fabricated by photoelectrochemical etching J Electrochem Soc 149 3 C180 C185 10.1149/1.1449953 (Pubitemid 34325874)
2. G Barillaro A Nannini M Piotto 2002 Electrochemical etching in HF solution for silicon micromachining Sens Actuators A 102 1-2 195 201 (Pubitemid 35422090)
3. Barillaro G, Diligenti A, Benedetti M, Merlo S (2006) Silicon micromachined periodic structures for optical applications at 1.55 μm. Appl Phys Lett 89(15):151110-151113
4. G Barillaro LM Strambini S Merlo 2008 Bandgap tuning of silicon micromachined 1-D photonic crystals by thermal oxidation IEEE J Sel Topics Quantum Electron 14 4 1074 1081 10.1109/JSTQE.2008.916183
5. G Barillaro S Merlo LM Strambini 2009 Optical characterization of alcohol-infiltrated one-dimensional silicon photonic crystals Opt Lett 34 12 1912 1914 10.1364/OL.34.001912
6. G Barillaro LM Strambini V Annovazzi-Lodi S Merlo 2009 Optical characterization of high-order 1-D silicon photonic crystals IEEE J Sel Topics Quantum Electron 15 5 1359 1367 10.1109/JSTQE.2009.2017278
7. G Barillaro S Merlo S Surdo LM Strambini F Carpignano 2010 Optical quality-assessment of high-order one-dimensional silicon photonic crystals with a reflectivity notch at ≈ 1.55 μm IEEE Photon J 2 6 981 990
8. A Chelnokov S David K Wang F Marty J-M Lourtioz 2002 Fabrication of 2-D and 3-D silicon photonic crystals by deep etching IEEE J Sel Topics Quantum Electron 8 4 919 927 10.1109/JSTQE.2002.801736 (Pubitemid 35337919)
9. E Chow A Grot LW Mirkarimi M Sigalas G Girolami 2004 Ultracompact biochemical sensor built with two-dimensional photonic crystal microcavity Opt Lett 29 10 1093 1095 10.1364/OL.29.001093
10. L De Stefano I Rea L Moretti FG Della Corte L Rotiroti D Alfieri I Rendina 2007 An integrated pressure-driven microsystem based on porous silicon for optical monitoring of gaseous and liquid substances Phys Stat Sol 204 5 1459 1463 10.1002/pssa.200674385 (Pubitemid 47120010)
11. C Grillet C Monat CL Smith MW Lee S Tomlyenovic-Hanic C Karnutsch BJ Eggleton 2004 Reconfigurable photonic crystal circuits Laser Photon Rev 4 2 192 204 10.1002/lpor.200810072
12. U Gruning V Lehmann 1996 Two-dimensional infrared photonic crystal based on macroporous silicon Thin Solid Films 276 1-2 151 154 10.1016/0040-6090(95) 08077-5 (Pubitemid 126368349)
13. KM Knowles ATJ van Helvoort 2006 Anodic bonding Int Mater Rev 51 5 273 311 10.1179/174328006X102501 (Pubitemid 44727187)
14. S-K Lee S-G Park JH Moon S-M Yang 2008 Holographic fabrication of photonic nanostructures for optofluidic integration Lab Chip 8 3 388 391 10.1039/b717960j (Pubitemid 351322629)
15. V Lehmann H Foll 1990 Formation mechanism and properties of electrochemically etched trenches in n-type silicon J Electrochem Soc 137 2 653 659 10.1149/1.2086525 (Pubitemid 20646184)
16. V Lehmann 1993 The physics of macropore formation in low doped n-type silicon J Electrochem Soc 140 2 2836 2843 10.1149/1.2220919 1298427
17. A Lipson EM Yeatman 2007 A 1-D photonic band gap tunable optical filter in (110) silicon J Microelectromech Syst 16 3 521 527 10.1109/JMEMS.2007.892894 (Pubitemid 47243485)
18. S Mandal JM Goddard D Erickson 2009 A multiplexed optofluidic biomolecular sensor for low mass detection Lab Chip 9 20 2924 2932 10.1039/b907826f
19. Mogensen KB, Kutter JP (2009) Optical detection in microfluidic systems. Electrophoresis 30(1):S92-S100 (and references within it)
20. C Monat P Domachuk J Eggleton 2007 Integrated optofluidics: a new river of light Nat Photon 1 106 114 10.1038/nphoton.2006.96
21. Monat C, Domachuk P, Grillet C, Collins M, Eggleton BJ, Cronin-Golomb M, Mutzenich S, Mahmud T, Rosengarten G, Mitchell A (2008) Optofluidics: a novel generation of reconfigurable and adaptive compact architectures. Microfluid Nanofluid 4(1-2):81-85 (and references within it)
22. PS Nunes NA Mortensen JP Kutter KB Mogensen 2008 Photonic crystal resonator integrated in a microfluidic system Opt Lett 33 14 1623 1625 10.1364/OL.33.001623
23. B Saadany M Malak M Kubota F Marty Y Mita D Khalil T Bourouina 2006 Free-space tunable and drop optical filters using vertical bragg mirrors on silicon IEEE J Sel Topics Quantum Electron 12 6 1480 1488 10.1109/JSTQE.2006. 884082 (Pubitemid 44956117)
24. Sakoda K (2005) Optical properties of photonic crystals. Springer, Germany
25. A Tolmachev LS Granitsyna EN Vlasova BZ Volchek AV Nashchekin AD Remenyuk EV Astrova 2002 One-dimensional photonic crystal obtained by vertical anisotropic etching of silicon Semiconductors 36 8 932 935 10.1134/1.1500475
26. IM White X Fan 2008 On the performance quantification of resonant refractive index sensors Optics Express 16 2 1020 1028 10.1364/OE.16.001020 (Pubitemid 351162269)