Mems based ethanol sensor using ZnO nanoblocks, nanocombs and nanoflakes as sensing layer

Sensors and Transducers

Volumn 134, Issue 11, 2011, Pages 85-94

  Pandya, H J ^a   Chandra, Sudhir ^a   Vyas, A L ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

Author keywords

Ethanol sensor; Mems sensor; Thermal evaporation; Zinc films; ZnO nanostructures

Indexed keywords

CATALYST-FREE SYNTHESIS; ETHANOL SENSORS; ETHANOL VAPOR; FAST RESPONSE TIME; INTEGRATED MEMS; MEMS SENSOR; MICROHEATER; NANO-STRUCTURED; NANOBLOCKS; NANOCOMBS; NANOFLAKES; OPERATING TEMPERATURE; SALIENT FEATURES; SENSING FILMS; SENSING LAYERS; ZNO; ZNO NANOSTRUCTURES;

DYNAMIC RESPONSE; ETHANOL; FILM PREPARATION; NANOWIRES; OXIDE FILMS; TEMPERATURE; THERMAL EVAPORATION; VOLATILE ORGANIC COMPOUNDS; ZINC; ZINC OXIDE;

SENSORS;

EID: 84856027558     PISSN: None     EISSN: 17265479     Source Type: Trade Journal    
DOI: None     Document Type: Article

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