Sharp silicon/lead zirconate titanate interfaces by electrophoretic deposition on bare silicon wafers and post-deposition sintering

Sensors and Actuators, A: Physical

Volumn 174, Issue 1, 2012, Pages 123-132

  Baldisserri, C ^a   Gardini, D ^a   Galassi, C ^a  

^a INSTITUTE OF SCIENCE AND TECHNOLOGY FOR CERAMICS   (Italy)

Author keywords

Colloidal suspensions; Electrophoretic deposition; Piezoelectric sensors; PZT; Silicon

Indexed keywords

COLLOIDAL SUSPENSIONS; CRACK FREE; DEGREE OF CRYSTALLINITY; ELECTRICAL CONNECTION; ELECTROPHORETIC DEPOSITION; ELECTROPHORETIC DEPOSITIONS; ETHANOL-BASED SUSPENSIONS; GREEN FILMS; LEAD ZIRCONATE TITANATE; METALLIC SUBSTRATE; ON-CHIP SENSORS; PIEZOELECTRIC SENSORS; POST-DEPOSITION; PZT; PZT FILM; SI WAFER; SOLVENT EVAPORATION; ZIRCONATE TITANATE;

DEPOSITION; ELECTRIC CONNECTORS; ELECTRIC FIELDS; ELECTROPHORESIS; ETHANOL; INTERFACES (MATERIALS); OHMIC CONTACTS; SEMICONDUCTING LEAD COMPOUNDS; SEMICONDUCTING SILICON COMPOUNDS; SENSORS; SILICON; SINTERING; SUBSTRATES; SUSPENSIONS (FLUIDS); THICK FILMS;

SILICON WAFERS;

EID: 84855870538     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2011.11.024     Document Type: Article

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