Study on the nano machining process with a vibrating AFM tip on the polymer surface

Applied Surface Science

Volumn 258, Issue 7, 2012, Pages 2620-2626

  Liu, Weitao ^a   Yan, Yongda ^a   Hu, Zhenjiang ^a   Zhao, Xuesen ^a   Yan, Jiucun ^a   Dong, Shen ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

AFM; Dynamic ploughing; Nanomachining; Polymer; Tapping mode

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELASTIC MODULI; MACHINING; MACHINING CENTERS; POLYMERS; TAPS;

CONTACT PRESSURES; DEFORMATION STATE; DRIVING FREQUENCIES; ELASTIC CONTACT THEORIES; MACHINING PROCESS; MAIN ERROR SOURCES; NANOMACHINING; TAPPING MODES;

PROCESS CONTROL;

EID: 84855552852     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2011.10.107     Document Type: Article

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