On chip complex signal processing devices using coupled phononic crystal slab resonators and waveguides

AIP Advances

Volumn 1, Issue 4, 2011, Pages

  Mohammadi, Saeed ^a   Adibi, Ali ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALS; PHONONS; RESONATORS; WAVEGUIDES;

COMPLEX SIGNAL PROCESSING; CROSS-COUPLINGS; DIRECT COUPLING; FREE SPECTRAL RANGE; HIGH FREQUENCY HF; MECHANICAL COUPLING; PHONONIC CRYSTAL; PHONONIC CRYSTALS (PNC);

SIGNAL PROCESSING;

EID: 84855338038     PISSN: None     EISSN: 21583226     Source Type: Journal    
DOI: 10.1063/1.3676168     Document Type: Article

References (16)

1. K. E. Petersen, Silicon as a mechanical material., Proceedings of the IEEE 70, 420 (1982). 10.1109/PROC.1982.12331
2. E. R. Brown, RF-MEMS switches for reconfigurable integrated circuits., IEEE Transactions on Microwave Theory and Techniques 46, 1868, (1998). 10.1109/22.734501
3. N. Yazdi, F. Ayazi, and K. Najafi, Micromachined inertial sensors., Proceedings of the IEEE 86, 1640 (1998). 10.1109/5.704269
4. C. T.-C. Nguyen, L. P. B. Katehi, and G. M. Rebeiz, Micromachined devices for wireless communications., Proceedings of the IEEE 86, 1756 (1998). 10.1109/5.704281
5. M. M. Sigalas, and E. N. Economou, Elastic and acoustic wave band-structure., Journal of Sound and Vibration 158, 377 (1992). 10.1016/0022-460X(92)90059-7 (Pubitemid 23576287)
6. M. S. Kushwaha, P. Halevi, L. Dobrzynski, and B. Djafari-Rouhani, Acoustic band-structure of periodic elastic composites., Physical Review Letters 71, 2022 (1993). 10.1103/PhysRevLett.71.2022
7. S. Mohammadi, A. A. Eftekhar, A. Khelif, H. Moubchir, R. Westafer, W. D. Hunt, A. Adibi, Complete phononic bandgaps and bandgap maps in two-dimensional silicon phononic crystal plates., Electronic Letters 43, 898 (2007). 10.1049/el:20071159 (Pubitemid 47220273)
8. S. Mohammadi, A. A. Eftekhar, A. Khelif, W. D. Hunt, and A. Adibi, Evidence of large high-frequency complete phononic band gaps in silicon phononic crystal plates., Applied Physics Letters 92, 2219051 (2008). 10.1063/1.2939097
9. Y. M. Soliman, M. F. Su, Z. C. Leseman, C. M. Reinke, I. El-Kady, and R. H. Olsson, Phononic crystals operating in the gigahertz range with extremely wide band gaps., Applied Physics Letters 97, 193502 (2010). 10.1063/1.3504701
10. S. Mohammadi, A. A. Eftekhar, W. D. Hunt, and A. Adibi, High-Q micromechanical resonators in a two-dimensional phononic crystal slab., Applied Physics Letters 94, 51903 (2009). 10.1063/1.3078284
11. S. Mohammadi, A. A. Eftekhar, W. D. Hunt, and A. Adibi, Demonstration of large complete phononic band gaps and waveguiding in high-frequency silicon phononic crystal slabs., in Proceedings of the 2008 IEEE International Frequency Control Symposium, 19-21 May 2008, pp. 768-772.
12. S. Mohammadi, A. Eftekhar, A. Khelif, and A. Adibi, Support loss suppression in micromechanical resonators by the use of phononic band gap structures., in Proceedings of the 2010 SPIE Photonics West, 76090W (2010).
13. A. Khelif, S. Mohammadi, A. A. Eftekhar, A. Adibi, and B. Aoubiza, Acoustic confinement and waveguiding with a line-defect structure in phononic crystal slabs., Journal of Applied Physics 108, 084515 (2010). 10.1063/1.3500226
14. S. Mohammadi, A. A. Eftekhar, and A. Adibi, Support Loss-free Micro Nano-mechanical Resonators using Phononic Crystal Slab Waveguides., in Proceedings of the 2010 IEEE Frequency Control Symposium, 521 (2010).
15. S. Mohammadi and A. Adibi, Waveguide-based phononic crystal micronano-mechanical high-Q resonators., Journal of Microelectromechanical Systems, DOI: 10.1109JMEMS.2011.2174426, In Press.
16. S. Mohammadi, A. A. Eftekhar, R. Pourabolghasem, and A. Adibi, Simultaneous high-Q confinement and selective direct piezoelectric excitation of flexural and extensional lateral vibrations in a silicon phononic crystal slab resonator., Sensors and Actuators A: Physical 167, 524 (2011). 10.1016/j.sna.2011.03.014