Fabrication of micro-coils using laser scan lithography on copper pipes

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1249-1252

  Kaneko, Yoshihisa ^a   Hashimoto, Kohei ^a   Horiuchi, Toshiyuki ^a  

^a TOKYO DENKI UNIVERSITY   (Japan)

Author keywords

Copper pipe; Cylindrical specimen; Laser scan exposure; Lithography; Micro coil; Resist coating; Wet etching

Indexed keywords

COPPER PIPE; LASER APPLICATIONS; LITHOGRAPHY; MASKS;

CYLINDRICAL SPECIMEN; LASER SCAN EXPOSURE; MICRO-COIL; RESIST COATING; WET ETCHING;

ELECTRIC COILS;

EID: 33646057709     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.102     Document Type: Article

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