Fabrication of planar and three-dimensional microcoils on flexible substrates

Microsystem Technologies

Volumn 12, Issue 10-11, 2006, Pages 973-978

  Woytasik, M ^a   Grandchamp, J P ^a   Dufour Gergam, E ^a   Martincic, E ^a   Gilles, J P ^a   Megherbi, S ^a   Lavalley, V ^a,b   Mathet, V ^a  

^a UNIVERSITÉ PARIS SACLAY   (France)

^b LABORATOIRE DES MATÉRIAUX ET DU GÉNIE PHYSIQUE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; ELECTRIC INDUCTORS; PHOTOLITHOGRAPHY; SENSORS;

MICROCOILS; MICROMOULDING; MICROSOLENOIDS;

ELECTRIC COILS;

EID: 33747626903     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0135-x     Document Type: Conference Paper

References (7)

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2. Malba V, Young D, Ou JJ, Bernhardt AF, Boser BE (1998) High-performance coil inductors on silicon. In: Proceedings of the IEEE 1998 Electronic Components and Technology Conference, pp 252-255
3. Nicolas S, Dufour-Gergam E, Bosseboeuf A, Bourouina T, Gilles J-P, Grandchamp J-P (1998) Fabrication of a gray-tone mask and pattern transfer in thick photoresist. J Micromech Microeng 8:95-98
4. Sacher E (1990) The present state of metallized polyimide. In: Sacher E, Pireaux J-J, Kowalczyk SP (eds) ACS symposium series 440, metallization of polymer, Montreal, September 1989. American Chemical Society, Washington, pp 1-7
5. Wertheimer MR, Martinu L, Klemberg-sapieha JE, Czere muszkin G (1999) Plasma treatment of polymers to improve adhesion. In; Mittal KL, Pizzi A (eds) Adhesion promotion techniques, technological applications. Marcel Dekker, New York, pp 139-174
6. Woytasik M, Dufour-Gergam E, Grandchamp J-P, Martincic E, Poirier-Quinot M, Ginefri J-C, Darrasse L, Vautier J (2004) Copper microcoils dedicated to NMR imaging. In: Proceedings of 15th micromechanics Europe workshop (MME'04), pp 143-146
7. Yoon J-B, Man C-H, Yoon E, Kim C-K (1998) Monolithic fabrication of electroplated solenoid inductors using three-dimensional photolithogtraphy of a thick photoresist. Jpn J Appl Phys 12B Part 1:7081-7085