Fabrication method for out-of-plane, micro-coil by surface micromachining

Sensors and Actuators, A: Physical

Volumn 97-98, Issue , 2002, Pages 702-708

  Gel, Murat ^a   Takeuchi, Shoji ^b   Shimoyama, Isao ^a  

^a UNIVERSITY OF TOKYO   (Japan)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

Micro coil; Micro inductor; Polyimide hinge

Indexed keywords

ELECTRIC INDUCTORS; ELECTRIC RESISTANCE; ELECTRIC WINDINGS; INDUCTANCE; INTEGRATED CIRCUIT LAYOUT; MICROELECTRONICS; MICROMACHINING; MONOLITHIC INTEGRATED CIRCUITS; POLYIMIDES; REACTIVE ION ETCHING; SILICON ON INSULATOR TECHNOLOGY; SOLDERED JOINTS;

MICRO COIL; MICRO INDUCTOR; POLYIMIDE HINGE; POST RELEASE FOLDING PROCESS; SURFACE MICROMACHINING;

ELECTRIC COILS;

EID: 0036544378     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00007-9     Document Type: Conference Paper

References (6)

1. Large suspended inductors on silicon and their use in a 2 mm CMOS RF amplifier
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4. Insect-model based micro-robot with elastic hinges
5. High aspect ratio micro actuation mechanism
6. A three-dimensional shape memory alloy microelectrode with clipping structure for insect neural recording