A MEMS conical spring actuator array

Journal of Microelectromechanical Systems

Volumn 14, Issue 2, 2005, Pages 243-253

  Fukushige, Takashi ^a   Hata, Seiichi ^a   Shimokohbe, Akira ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

AC drive; Conical spring microactuator; Out of plane; Thin film metallic glass; Three dimensional (3 D) shape

Indexed keywords

ARRAYS; BOUNDARY CONDITIONS; ELECTRIC DRIVES; MATHEMATICAL MODELS; METALLIC GLASS; MICROACTUATORS; THIN FILMS;

AC DRIVE; CONICAL SPRING MICROACTUATOR; THIN FILM METALLIC GLASS;

MICROELECTROMECHANICAL DEVICES;

EID: 18844457328     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.839345     Document Type: Article

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