Investigation of graphene piezoresistors for use as strain gauge sensors

Journal of Vacuum Science and Technology B

Volumn 29, Issue 6, 2011, Pages

  Chen, Xing ^a   Zheng, Xiaohu ^a,b   Kim, Ji Kwan ^b   Li, Xinxin ^c   Lee, Dong Weon ^a  

^a Chonnam National University   (South Korea)

^b HUAIYIN INSTITUTE OF TECHNOLOGY   (China)

^c SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; GRAPHENE; GRAPHENE DEVICES; SILICON WAFERS;

CONVENTIONAL PHOTOLITHOGRAPHY; E-BEAM LITHOGRAPHY; EXFOLIATED GRAPHENE; FABRICATION METHOD; FABRICATION TECHNIQUE; HIGH GAUGE FACTORS; PIEZORESISTIVE SENSITIVITIES; STRAIN GAUGE SENSORS;

STRAIN GAGES;

EID: 84255189647     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.3660784     Document Type: Article

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