SCOPUS 정보 검색 플랫폼

Volumn 29, Issue 6, 2011, Pages

Patterned atomic layer epitaxy of Si/Si(001):H

Author keywords

[No Author keywords available]

Indexed keywords

DANGLING BONDS; SILICON;

ARBITRARY PATTERNS; ATOMIC PRECISION; DISILANES; ELECTRON EXPOSURE; GAS SOURCES; ISLAND SIZE; LITHOGRAPHY CONDITIONS; SI(001) SURFACES;

ATOMS;

EID: 84255172720 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3628673 Document Type: Article

Times cited : (24)

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