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Volumn 99, Issue 24, 2011, Pages

Point defect engineering strategies to suppress A-center formation in silicon

Author keywords

[No Author keywords available]

Indexed keywords

A-CENTER; DEFECT ENGINEERING; DENSITY FUNCTIONAL THEORY CALCULATIONS; SN DOPING; VACANCY-OXYGEN PAIR;

EID: 83755178794     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3666226     Document Type: Article
Times cited : (68)

References (20)
  • 1
    • 33749165297 scopus 로고    scopus 로고
    • Vacancy-assisted diffusion in silicon: A three-temperature-regime model
    • DOI 10.1103/PhysRevLett.97.135901
    • D. Caliste and P. Pochet, Phys. Rev. Lett. 97, 135901 (2006); 10.1103/PhysRevLett.97.135901 (Pubitemid 44477067)
    • (2006) Physical Review Letters , vol.97 , Issue.13 , pp. 135901
    • Caliste, D.1    Pochet, P.2
  • 5
    • 77957013172 scopus 로고
    • edited by F. Shimura, Semiconductors and Semimetals, (Academic, Orlando)
    • R. C. Newman and R. Jones, in Oxygen in Silicon, edited by, F. Shimura, Semiconductors and Semimetals, (Academic, Orlando, 1994), Vol. 42, p. 289.
    • (1994) Oxygen in Silicon , vol.42 , pp. 289
    • Newman, R.C.1    Jones, R.2
  • 12
    • 84855341857 scopus 로고    scopus 로고
    • See supplementary material at http://dx.doi.org/10.1063/1.3666226 E-APPLAB-99-004150 for details regarding the experimental methodology, IR spectra, the thermal evolution of the defects, and sketch of the calculated configurations in Table.
  • 20
    • 17544362330 scopus 로고    scopus 로고
    • Diffusion and dissociation mechanisms of vacancy-oxygen complex in silicon
    • DOI 10.1063/1.1897433, 142107
    • M. Furuhashi and K. Taniguchi, Appl. Phys. Lett. 86, 142107 (2005). 10.1063/1.1897433 (Pubitemid 40552466)
    • (2005) Applied Physics Letters , vol.86 , Issue.14 , pp. 1-3
    • Furuhashi, M.1    Taniguchi, K.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.